Lab on E-beam Technology National Taiwan University
Course Overview
THE COURSE INCLUDE EBEAM TECHNOLOGY STUDY AND TRAINING 1.TRAINING ON SEM: UTILIZE SEM TO OBSERVE THE NANO-STRUCTURE ON THE SURFACE. THE ACCELERATION VOLTAGE IS FROM 500V TO 30KV. 2.TRAINING ON E-BEAM LITHOGRAPHY: UTILIZE E-BEAM LITHOGRAPHY TO FABRICATE THE NANO-STRUCTURE. THE ACCELERATION VOLTAGES ARE 50KV AND 100KV. 3.TRAINING ON DUAL BEAM FOCUS ION BEAM: UTILIZE DUAL BEAM FOCUS ION BEAM TO ETCH THE SAMPLE AND OBSERVE IT BY ELECTRON BEAM AT THE SAME TIME. FURTHERMORE, IT INCLUDE THE DEPOSITION SYSTEM, LOW TEMPERATURE AND FABRICATE THE SAMPLE FOR TEM. 4. STUDY THE PARAMETERS OF E-BEAM LITHOGRAPHY ON DIFFERENT SUBSTRATES AND THE ISSUES OF FOLLOWING SEMICONDUCTOR PROCESS. 5. STUDY THE APPLICATIONS OF E-BEAM LITHOGRAPHY IN DIFFERENT RESEARCH AREAS, INCLUDING ELECTRONICS, PHOTONICS, OPTOELECTRONICS, BIOMEDICAL ELECTRONICS, AND MICRO MECHANICAL SYSTEMS. 6. FOCUS ON THE DISCUSSION OF STUDENTS’ RESEARCH TOPICS UNDER THEIR ORIGINAL ADVISORS. 7. FOR THE SPECICAL TOPIC, DISCUSS THE RELATED INFORMATION AND INVITE FAMOUS INTERNATIONAL SCHOLARS TO GIVE SPEECHES AND ADVICES.
Learning Achievement
Competence
Course prerequisites
BECAUSE OF THE HIGH PRICE OF MAINTENANCE AND CONSUMABLES, THE STUDENTS WHO WANT TO TAKE THE COURSE NEED THEIR ADVISOR’S PERMISSION AND FUNDING.
Grading Philosophy
Course schedule
Course type
Online Course Requirement
Instructor
CHIEH-HSIUNG KUAN
