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Course Detail

Degree
Master
Standard Academic Year
Course delivery methods
face-to-face
Subject
Engineering & technology
Program
School
College of Electrical Engineering & Computer Science
Department
Campus
Classroom
Course Offering Year
Course Offering Month
September - November
Weekday and Period
Wednesday 6
Capacity
Credits
1
Language
English
Course Number
EEE5038

Lab on E-beam Technology National Taiwan University

Course Overview

THE COURSE INCLUDE EBEAM TECHNOLOGY STUDY AND TRAINING 1.TRAINING ON SEM: UTILIZE SEM TO OBSERVE THE NANO-STRUCTURE ON THE SURFACE. THE ACCELERATION VOLTAGE IS FROM 500V TO 30KV. 2.TRAINING ON E-BEAM LITHOGRAPHY: UTILIZE E-BEAM LITHOGRAPHY TO FABRICATE THE NANO-STRUCTURE. THE ACCELERATION VOLTAGES ARE 50KV AND 100KV. 3.TRAINING ON DUAL BEAM FOCUS ION BEAM: UTILIZE DUAL BEAM FOCUS ION BEAM TO ETCH THE SAMPLE AND OBSERVE IT BY ELECTRON BEAM AT THE SAME TIME. FURTHERMORE, IT INCLUDE THE DEPOSITION SYSTEM, LOW TEMPERATURE AND FABRICATE THE SAMPLE FOR TEM. 4. STUDY THE PARAMETERS OF E-BEAM LITHOGRAPHY ON DIFFERENT SUBSTRATES AND THE ISSUES OF FOLLOWING SEMICONDUCTOR PROCESS. 5. STUDY THE APPLICATIONS OF E-BEAM LITHOGRAPHY IN DIFFERENT RESEARCH AREAS, INCLUDING ELECTRONICS, PHOTONICS, OPTOELECTRONICS, BIOMEDICAL ELECTRONICS, AND MICRO MECHANICAL SYSTEMS. 6. FOCUS ON THE DISCUSSION OF STUDENTS’ RESEARCH TOPICS UNDER THEIR ORIGINAL ADVISORS. 7. FOR THE SPECICAL TOPIC, DISCUSS THE RELATED INFORMATION AND INVITE FAMOUS INTERNATIONAL SCHOLARS TO GIVE SPEECHES AND ADVICES.

Learning Achievement

Competence

Course prerequisites

BECAUSE OF THE HIGH PRICE OF MAINTENANCE AND CONSUMABLES, THE STUDENTS WHO WANT TO TAKE THE COURSE NEED THEIR ADVISOR’S PERMISSION AND FUNDING.

Grading Philosophy

Course schedule

Course type

Online Course Requirement

Instructor

CHIEH-HSIUNG KUAN

Other information

Site for Inquiry

Please inquire about the courses at the address below.