Course Overview

Optical metrology is used as cross-sectional technology in many disciplines. At first, the basic characteristics of light and its interaction with matter are pointed out in a short fundamental chapter. Subsequently, the tools of optical metrology, i.e. active and passive optical elements are discussed. The main part of the lecture deals with measuring techniques like: geometry measurements, profilometry, shape measurements, spectroscopy, highspeed cameras, infrared imaging, and biophotonics.

Learning Achievement

The students understand the physical functional principles of optical metrology. They have learned the characteristics and limits of optical metrology. Furthermore, they got to know the selection criteria of suitable optical measuring techniques for a given application.

Competence

Course prerequisites

none; recommended prior knowledge: Fundamental knowledge of electromagnetic waves and optics

Grading Philosophy

oral exam (30 min)

Course schedule

Week1: Introduction Week2: followed by Week3 to the Final Week

Course type

Online Course Requirement

Instructor

Priv.-Doz. Dr.-Ing. Nils C. Ger­hardt

Other information

Lecture and Exercise Literature: Saleh, Teich, "Fundamentals of Photonics", Wiley & Sons, 2007

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