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Course Detail

Degree
Standard Academic Year
Course delivery methods
face-to-face
Subject
Engineering & technology
Program
School
College of Electrical Engineering & Computer Science
Department
Campus
Classroom
Course Offering Year
Course Offering Month
September - November
Weekday and Period
Wednesday 234
Capacity
Credits
3
Language
English
Course Number
OE5027

Optical Nano-electro-mechanical System National Taiwan University

Course Overview

The major topics include: 1) Introduction: development from MEMS to NEMS 2) Fabrication technologies of micro devices and nano-etch technology 3) Governing physics in micro/nano world, actuation mechanisms, and mechanical structures 4) Short introduction to optics in free space and waveguides 5) Optical MEMS/NEMS devices and case studies 6) Presentations and/or reports by students

Learning Achievement

This course will focus on micro/nano devices and their applications. The material will cover the principles, designs, and fabrication processes behind this emerging technology.

Competence

Course prerequisites

Grading: Midterm Exam 30% Final Exam 40% Project 30%

Grading Philosophy

Course schedule

Course type

Online Course Requirement

Instructor

JUI-CHE TSAI

Other information

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