Optical Nano-electro-mechanical System National Taiwan University
The major topics include: 1) Introduction: development from MEMS to NEMS 2) Fabrication technologies of micro devices and nano-etch technology 3) Governing physics in micro/nano world, actuation mechanisms, and mechanical structures 4) Short introduction to optics in free space and waveguides 5) Optical MEMS/NEMS devices and case studies 6) Presentations and/or reports by students
This course will focus on micro/nano devices and their applications. The material will cover the principles, designs, and fabrication processes behind this emerging technology.
Grading: Midterm Exam 30% Final Exam 40% Project 30%
Online Course Requirement