Physical Properties and Evaluation of Semiconductor Defects and Impurities University of Tsukuba
Course Overview
First, classify the crystalline defects in semiconductors and understand their structures. Then, study various electrical and optical properties of these defects. This lecture is opened in every odd year. Textbook : Hayes and Stoneham; Defects and Defect Processes in Nonmetallic Solids
Learning Achievement
To acquire a level of knowledge capable of carrying out research on crystal defects and impurities in the semiconductor field. (1) Understand what a semiconductor is and the physical properties derived from its crystal and electronic structures. (2) Understand the manufacturing methods of semiconductor crystals in industry, and to understand the characteristics of each method and future improvements. (3) Understand the types and characteristics of crystal defects occurring in a crystal. (4) Understand the defect generation mechanism and dynamic characteristics. (5) Understand the electrical and optical properties of defects. (6) Understand impurity gettering and impurity doping due to defects. (7) Understand the principles of how to evaluate defects and impurities in crystals. (8) Understand how defects affect device characteristics.
Competence
"Internationalism" and "Engineering Fundamentals"
Course prerequisites
None
Grading Philosophy
Grading will be based on reports and tests.
Course schedule
Lectures are conducted using projectors and important materials are distributed. The classification, evaluation and device application of defects and impurities from the base of a semiconductor crystal are performed according to the following plan. Whether the lecture will be delivered in a face-to-face or online format will be determined by a pre-first lecture questionnaire. About SemiconductorsCrystal growthCrystal structureBasis for defects and impurities in the crystalDefect Generation Mechanism and dynamic characteristics of defects (diffusion, etc.)Static characteristics of defects (electrical and optical properties)Impurity gettering due to defects and impurity dopingMethod for evaluating defects and impurities in semiconductors-IMethod for evaluating defects and impurities in semiconductors-IIEffect on device characteristics (examples)
Course type
Lectures
Online Course Requirement
Instructor
Fukata Naoki
Other information
Semiconductors are one of the most important materials used in the world, so please deepen your understanding of why they are important by understanding their characteristics. In order to maximize the characteristics of semiconductors, it is important to reduce defects in semiconductors. To do this, it is important to understand the defects and to know the types, characteristics and evaluation methods of the defects. I hope you will learn the above and use it in your own research activities.
Site for Inquiry
Link to the syllabus provided by the university