Lab on E-beam Technology

THE COURSE INCLUDE EBEAM TECHNOLOGY STUDY AND TRAINING 1.TRAINING ON SEM: UTILIZE SEM TO OBSERVE THE NANO-STRUCTURE ON THE SURFACE. THE ACCELERATION VOLTAGE IS FROM 500V TO 30KV. 2.TRAINING ON E-BEAM LITHOGRAPHY: UTILIZE E-BEAM LITHOGRAPHY TO FABRICATE THE NANO-STRUCTURE. THE ACCELERATION VOLTAGES ARE 50KV AND 100KV. 3.TRAINING ON DUAL BEAM FOCUS ION BEAM: UTILIZE DUAL BEAM FOCUS ION BEAM TO ETCH THE SAMPLE AND OBSERVE IT BY ELECTRON BEAM AT THE SAME TIME. FURTHERMORE, IT INCLUDE THE DEPOSITION SYSTEM, LOW TEMPERATURE AND FABRICATE THE SAMPLE FOR TEM. 4. STUDY THE PARAMETERS OF E-BEAM LITHOGRAPHY ON DIFFERENT SUBSTRATES AND THE ISSUES OF FOLLOWING SEMICONDUCTOR PROCESS. 5. STUDY THE APPLICATIONS OF E-BEAM LITHOGRAPHY IN DIFFERENT RESEARCH AREAS, INCLUDING ELECTRONICS, PHOTONICS, OPTOELECTRONICS, BIOMEDICAL ELECTRONICS, AND MICRO MECHANICAL SYSTEMS. 6. FOCUS ON THE DISCUSSION OF STUDENTS’ RESEARCH TOPICS UNDER THEIR ORIGINAL ADVISORS. 7. FOR THE SPECICAL TOPIC, DISCUSS THE RELATED INFORMATION AND INVITE FAMOUS INTERNATIONAL SCHOLARS TO GIVE SPEECHES AND ADVICES. College of Electrical Engineering & Computer Science BECAUSE OF THE HIGH PRICE OF MAINTENANCE AND CONSUMABLES, THE STUDENTS WHO WANT TO TAKE THE COURSE NEED THEIR ADVISOR’S PERMISSION AND FUNDING. CHIEH-HSIUNG KUAN Wednesday 6 EEE5038 1

Advanced applied physics topics in ultimate and beyond CMOS

During the past 80 years, applied physics has pushed, inspired, and produced major high-tech industries,

fromcomputing, communication, memory, display, transportation, to energy.

This has been unprecedented in human history of science and technology.

Applied physics has played a drastically different role than the conventional paths taken by academic science and

traditional industries.

Quantum phenomena (and the related theories), new materials/atomic-scale thin films (and their fabrication tools

such as molecular beam epitaxy, atomic layer deposition, metal-organic chemical vapor deposition),

novel/high-performance devices, and atomic-scale probing tools have been intertwined and generated useful

and essential products beneficial to human being, in revolutionizing computing/communication, and drastically

improving medical diagnosis.

Very importantly, new physics/application has been discovered, such as transistors, lasers,

quantum Hall effect/fractional quantum Hall effect, fiber optics, charge-coupled devices,

2-dimensional quantum materials.

Applied physics has been strongly engaging in materials science,

electrical/electronic devices, and high-tech industries.

We have designed this new course of Advanced applied physics topics in ultimate and beyond CMOS

in the Fall Semester of 2016.

The focus will be on nano-electronics for ultimate CMOS (complementary metal oxide semiconductor) and beyond,

which needs strong understanding of solid-state and semiconductor physics and new materials

such as spintronics and topological insulators. These topics are enabling advanced devices for Taiwans industry.

In nano-electronics, the high- plus metal gate, which replaced conventional SiO2 and poly-Si

and resolved the gate leakage issue since the 45 nm node CMOS production, is one of the most important

recent innovations in semiconductor industry, and puts the dominant role of Si as the major semiconductor

into question.

The new technology of high- plus metal gate on high mobility semiconductors like Ge and InGaAs integrated

with Si will lead to faster devices with low power consumption. The present feverish world-wide research efforts

are integrating advanced research programs on nano-science, nano-materials, and nano-electronics cohesively

to enable a high performance “green” IC technology.

Spintronics and topological insulators are being feverishly studied for beyond the present

CMOS based on the charges of the electrons.
The perspective students are required and encouraged to apply their understanding in rigorous physics to tackle research topics relevant to high tech industry in Taiwan. Particularly, undergraduates of juniors and seniors are permitted and encouraged to take the course, with the assigned topics to be adjusted to suit their status in their physics understanding in their perspective years. College of Science We will spend 8 weeks in rigorously studying fundamental solid state physics with Ashcrof/Mermin

“Solid State Physics” as the textbook, and semiconductor physics/devices with Taur/Ning

“Fundamentals of Modern VLSI Devices” as the textbook.

We then spend 4 weeks in researching in the ultimate CMOS with high k + metal gates on InGaAs and Ge,

and another 4 weeks in spintronics and topological insulators. Perspective students

(Ph.D., Master, undergraduates) will be assigned topics

for their mid-term and final reports; the degree/level of the assigned research topics will depend on the perspective

students’ backgrounds. The reports will be presented in oral and written forms in English.

The mid-term orals will be given in 10 minutes with the final in 15 minutes.

The reports are not collections of information, but are required to be based on rigorous scientific knowledge.

They are encouraged to broaden their knowledge in physics to tackle the challenges in the assigned/selected topics.

Homework will be given from time to time.
HONG MING-HUI Tuesday 34 Wednesday 34 Phys7050 4 The upper limit of the number of non-majors: 2.

Romote Sensing

See details at the class homepage: http://www.rslabntu.net/courses/remote_sensing See details at the class homepage: http://www.rslabntu.net/courses/remote_sensing College of Bio-Resources & Agriculture KE SHENG CHENG Friday 789 BSE5019 3

Advanced Chemical Engineering Kinetics

Chemical kinetics and reactor design considering the influence of mass and heat transfers, and the process optimization. Students will gain the knowledge of chemical kinetics and reactor design, including the heterogeneous catalysis, analysis of reaction data, the effects of mass and heat transfers, and the chemical process optimization in a industrial plant. Thus, students are capable to solve the problems, to coordinate a team and to have creativity in order to apply, evaluate and design the reaction process in chemical industry. College of Engineering Elements of Reaction Kinetics

1.Conversion and Extent of Reaction

2.Complex reaction

3.Influence of temperature

4.Determination of kinetic parameters Kinetics of Heterogeneous Catalytic Reactions

1.Adsorption of solid catalyst

2.Rate equations

3. Hougen-Watson (or Langmuir-Hinshelwood) Models

4.Model discrimination and parameter estimation
5.Differential and integral methods of kinetic analysis Transport Processes with Reactions Catalyzed by Solids

1.Catalyst structure

2.Pore diffusion

3.Diffusion and reaction

4.Concept of effectiveness factor

5.Criteria of diffusion limitation

6.Generalized Thiele modulus

7.Non-isothermal particles Gas-Liquid Reactions

1.Two-film theory

2.Surface renewable theory

3.Utilization and enhancement factors

4.Surface renewable theory Analysis of Ideal Type Chemical Reactors

1.Batch and semi batch reactor

2.Plug flow reactor

3.Perfectly mixed flow reactor Fixed Bed Catalytic Reactors

1.Importance and scale of fixed bed catalytic process

2. Factors in the preliminary design Nonideal Flow Patterns

1.Age distribution functions

2.residence time distribution

3.Micro and macro mixing Fluidized Bed and Transport reactors

1.Features of fluidization

2.Fludized catalytic cracking Special Topics

Evaluation and Assessment: Midterm 30%, Final 30% Homework 25% (including problem solving using computer programs), and Final project 15% CHENG-CHE HSU Monday 34 Thursday 2 ChemE7004 3

Mechanical Behavior of Materials

In this course, we will study the mechanical behavior of materials, from the continuum mechanics to the atomic and molecular mechanisms that are responsible for those properties in metallic materials. We will cover elastic and plastic deformation, creep, fracture of materials including crystalline and amorphous metals and will focus on the relationship between microstructure and mechanical behavior. 1. To describe states of stress and strain in materials. 2. To understand the essentials of elasticity and elastic deformation. 3. To overview three plastic modes in metals: dislocation slip, twinning, and transformation. 4. To understand plastic deformation and work hardening. 5. To describe the relationship between microstructure and fracture. 6. To realize essentials of creep. College of Engineering 1. Materials Science and Engineering 2. Engineering Mathematics or Physical Mathematics Hung-Wei Yen Wednesday 234 MSE7014 3

Waste Treatment Engineering

1.緒論 2.廢棄物的特性指標及分析方法 3.廢棄物的特性 4.廢棄物處理方法 5.池塘 6.好氣處理 7.厭_處理 8.堆肥化處理 9.養殖廢水與廢棄物處理 10._染源控制 11.實驗 本課程主要針對生物_業廢棄物的種類及其對生態環境之影響,廢棄物的特性及分析方法,現行之處理方法,_染源之控制及管理,以及廢棄物之回收及利用等作整體性的介紹,希望學生在修習本課程之後對農業廢棄物的現況能有通盤的了解。 College of Bio-Resources & Agriculture CHU-YANG CHOU Tuesday 789 BME5703 3

Introduction to Energy Engineering

This course introduces the state-of-the-art energy technology and development. Subjects include energy generation, storage and conversion technology and related applications will be covered. For example: hydrogen economy, nuclear energy, wind power and solar cells, batteries, green buildings etc. I aim to prepare students with abilities of active learning and creative thinking. Innovative pedagogical methods such as fishbowl discussion, brainstorming, mock conference, and debate etc. will be practiced in this class. College of Bio-Resources & Agriculture Students are required to study the assigned contents each week, and exchange ideas and thoughts in class. 50% of the final grade is based on in-class discussions, while the other 50% is based on the final report. The topics of final projects, which focus on energy issues facing Taiwan, will be developed over the course of the classes by each student. HSUN-YI CHEN Tuesday 6 Friday 34 BME5920 3

Simulation of Light Scattering and Propagation

EACH LECTURE WILL BE TAILORED ACCORDING TO STUDENTS UNDERSTANDING. SUBJECTS TO BE COVERED FOR THIS COURSE ARE AS FOLLOWS: 1) THEORETICAL REVIEW OF ELECTROMAGNETISM 2) INTRODUCTION TO VARIOUS OPTICAL SIMULATION TECHNIQUES 3) MONTE CARLO TECHNIQUE 4) NUMERICAL SOLUTIONS OF MAXWELL’S EQUATIONS 5) APPLICATION OF THE TAYLOR’S EXPANSION 6) SCALAR WAVE EQUATION 7) THE FINITE-DIFFERENCE TIME-DOMAIN TECHNIQUE 8) PRAGMATIC SIMULATION OF OPTICAL PROBLEMS College of Electrical Engineering & Computer Science PREREQUISITES: – GENERAL PHYSICS – CALCULUS – ELECTROMAGNETISM – BASIC PROGRAMMING SKILLS (MATLAB, FORTRAN, OR C/C++) GRADING FACTORS: ASSIGNMENTS: 35% MIDTERM EXAM: 25% FINAL EXAM: 30% PARTICIPATION IN CLASS : 10% GRADING FACTORS INCLUDE AN ASSESSMENT OF STUDENTS’ UNDERSTANDING OF THE COURSE CONTENT, PARTICIPATION IN CLASS, AND THEIR ABILITY IN COMPLETING THE ASSIGNMENTS. SIMULATION ASSIGNMENTS ARE DESIGNED TO PREPARE STUDENTS WITH HANDS-ON EXPERIENCE OF LIGHT PROPAGATION SIMULATION. STUDENTS ARE EXPECTED TO BECOME FAMILIAR WITH MATLAB. MIDTERM AND FINAL EXAMS WILL SERVE THE PURPOSE TO EVALUATE STUDENTS’ LEARNING PROGRESS. GRADES THUS ARE GIVEN BASED UPON STUDENTS’ ABILITY IN CARRYING OUT THE ASSIGNMENTS AND THEIR PERFORMANCE IN THE MIDTERM AND FINAL EXAMS. Wednesday 789 OE5047 3

Solid State Lighting

1. INTRODUCTION TO LIGHTING 2. COLOR SCIENCE 3. INRODUCTION TO DIODES 4. CARRIER RECEOMBINATION 5. LED MATERIAL AND DEVICE 6. HIGH POWER LEDS 7. APPLICATION OF LEDS VARIOUS PROGRAM NONE! UNDERGRADUATE STUDENTS ARE EXTREMELY WELCOME TO TAKE THE COURSE! JIAN JANG HUANG Tuesday 789 OE5040 3

Analog Integrated Circuit

THIS COURSE IS OFFERED FOR ELECTRICAL ENGINEERING DEPARTMENT AND GRADUATE INSTITUTE OF ELECTRONICS ENGINEERING.

THIS COURSE IS GRADUATE-LEVEL AND SUITABLE FOR SENIOR UNDERGRADUATE STUDENTS AND GRADUATE STUDENTS.

IT IS A SELECTIVE COURSE AND CONTAINS 13 CHAPTERS.

1: BASIC MOS DEVICE PHYSICSCHAPTER

2: SINGLE-STAGE AMPLIFIERSCHAPTER

3: DIFFERENTIAL AMPLIFIERSCHAPTER

4: PASSIVE AND ACTIVE CURRENT MIRRORS CHAPTER

5: FREQUENCY RESPONSE OF AMPLIFIERSCHAPTER

6: NOISECHAPTER

7: FEEDBACKCHAPTER

8: OPERATIONAL AMPLIFIERSCHAPTER

9: STABILITY AND FREQUENCY COMPENSATIONCHAPTER

10: SWITCH-CAP CIRCUITSCHAPTER

11: BANDAGE REFERENCESCHAPTER

12: NONLINEARITY AND MISMATCHCHAPTER

13: LAYOUT AND PACKAGING
College of Electrical Engineering & Computer Science STUDENTS ARE EXPECTED TO KNOW SOME FUNDAMENTALS OF CIRCUITS AND ELECTRONIC CIRCUITS. GRADING 1. 20% HOMEWORK+ 30% MIDTERM+ 30% FINAL+ 20% PROJECT JRI LEE Friday 789 EE5112 3

Antenna

This course will cover the following topics: 1. Introduction 2. Antenna Basics 3. The Antenna Family 4. Point Source 5. Array of Point Sources (Phase distribution) 6. Array of Point Sources (Amplitude distribution) 7. Fourier Transform Relation 8. Thin Linear Antennas 9. Loop Antennas 10. End-Fire Antennas 11. Slot and Patch Antennas Students taking this course will have in-depth understanding of the operational principles and basic parameters of antennas, the basic theory, design, and analysis of antenna arrays, antenna measurements, and the radiation mechanisms and performance of commonly-used antenna types. College of Electrical Engineering & Computer Science Prerequisite courses: electromagnetics CHEN SHI-YUAN Friday 234 EE5010 3

English Presentation for Scientists and Engineers (Ⅰ)

課程大綱: THIS CLASS IS AN INTRODUCTORY CLASS FOR ENGINEERING AND SCIENCE STUDENTS WHO HAVE NEEDS AND ARE INTERESTED IN DOING PRESENTATIONS IN ENGLISH. THIS COURSE FOCUSES ON HOW TO DELIVER A DYNAMIC TECHNICAL PRESENTATION EVEN IF ENGLISH IS NOT THE FIRST LANGUAGE. CLASSES ARE ORGANIZED IN A WAY THAT STUDENTS ARE REQUIRED TO PREPARE AND GIVE SHORT PRESENTATIONS OF DIFFERENT TYPES FOLLOWED BY DISCUSSIONS AND LECTURES ON THE SPECIFIC TOPICS. THE CONTENT OF EACH CLASS WILL VARY DEPENDING ON THE NEEDS OF THE STUDENTS. 1. INTRODUCTION ORAL PRESENTATION IN THE REALM OF SCIENCE AND TECHNOLOGY 2. PREPARATION A. TARGET YOUR TALK (AUDIENCE, PURPOSE, BEGINNINGS, AND ENDINGS) B. GOOD PRESENTATION SLIDES C. VISUAL AIDS D. PRACTICE, PRACTICE, PRACTICE 3. DELIVERY A. TAKE CONTROL OF THE SITUATION B. VOICE AND LANGUAGE (IS ACCENT A PROBLEM?) C. BODY LANGUAGE AND GESTURES D. HANDLING QUESTION-AND-ANSWER 4. LEGAL AND ETHICAL ISSUES WHEN CREATING PRESENTATIONS College of Engineering ANGELA YU-CHEN LIN Tuesday 67 EnvE8003 2